Resolution Enhancement Techniques in Optical Microlithography Based on Multiple Imaging

Ph.D. Thesis

Written by: Miklós Erdélyi

Szeged

1999

Title

Contents

Chapter 1: Introduction

Chapter 2: Previous Research and Scientific Background

Chapter 3: Objectives

Chaptes 4: Scientific Results and Interpretation

        4.1: Interferometric Phase Shifting Technique Combined with off-axis illumination

        4.2: Annular Illumination - An experimental Demonstration

        4.3: Coated Objective

        4.4: Double Exposure by means of a birefringent plate

        4.5: Coherent Multiple Imaging Technique by means of a Fabry-Perot Interferometer

Chapter 5: Conclusion

Chapter 6: Magyar Nyelvű Összefoglaló

Bibliography